Product Description
Working principle
Roots vacuum pump, also known as mechanical booster pump, is a rotary positive displacement vacuum pump. The schematic structure of the Roots vacuum pump is shown in Figure on the left. There are 2 figure-8 rotors in the pump chamber, which are installed on a pair of shafts in parallel, and are driven by a pair of synchronous gear. The rotor and the rotor, the rotors and the pump chamber maintain a certain gap and do not contact each other, so the friction loss during operation is very small, the friction power consumption is extremely small, and high-speed operation can be achieved.
Figure below shows the internal structure of the Roots vacuum pump. The 2 rotors of the pump are supported in the rolling bearings on the end covers on both sides of the pump chamber, and rely on a pair of adjustable synchronous gears to keep the 2 rotors rotating at high speed. A certain mutual position, and the end face gap between the rotor and the end cover is guaranteed by the special structure of the fixed end (closer to the motor side), so that the pump can only expand to 1 end of the gearbox due to heat during operation.
The 4 sets of PTFE piston ring seals in the end caps on both sides can prevent the lubricating oil in the oil tanks on both sides from entering the pump chamber, and the balanced mechanical seal at the outlet shaft can prevent the atmosphere from leaking into the pump chamber.
The cooling method of the pump is usually air cooling. If the pump is used for working in the high pressure range, it is recommended to select a pump with a water cooling structure. The power of the motor is transmitted to the driving shaft through the coupling, and then the driven shaft is driven to rotate by the driving shaft through the synchronous gear. ZJ series Roots vacuum pumps are of horizontal structure, and the pump is directly connected with the motor by means of a coupling. But the pump with special requirements can adopt the V-belt drive structure.
ZJP type Roots vacuum pump with bypass valve is a derivative product of ZJ type Roots vacuum pump. The pumping principle is the same as that of ZJ type pump. It also uses a pair of 8-shaped rotors to maintain a certain gap in the pump casing. It rotates to generate suction and exhaust. The difference is that the inlet and exhaust ports of the ZJP type Roots vacuum pump with bypass valve are connected, and a gravity valve is installed vertically on the channel of the 2 (see Figure on the left). When the force on the valve caused by the pressure difference between the intake port and the exhaust port exceeds the weight of the valve itself, it will automatically open. This value of pressure difference which cause the valve to open is the highest differential pressure at which the pump can operate reliably. Therefore, this valve is actually an overload automatic protection valve, and it is also the biggest advantage of ZJP type Roots vacuum pump. Theoretically, the ZJP Roots pump can be started synchronously with the backing pump under atmospheric pressure to pump the system. If the system volume is large, the bypass valve of the ZJP Roots pump is open for a long time, and the pump’s effective pumping speed is small, so it is not economical to start the ZJP type Roots pump at atmospheric pressure for large systems. It is recommended to start the ZJP Roots vacuum pump when the backing pump reaches a certain pressure.
The advantage of the Roots vacuum pump is that it has a higher pumping speed at a lower inlet pressure, but it cannot be used alone. There must be a backing vacuum pump in series, and the pressure in the system is pumped by the backing vacuum pump to an allowable starting pressure of the Roots vacuum pump before it is started(See figure on the left). In general, the Roots vacuum pump is not allowed to work under high pressure difference, otherwise it will be overloaded, overheated and damaged, so the backing vacuum pump must be selected reasonably, and the necessary protective equipment must be installed.
The backing vacuum pump is generally an oil-sealed mechanical pump, but if the ultimate pressure requirement is not high, other forms of rough vacuum pump can be used as the backing pump, especially when the gas containing a large amount of water vapor is extracted, the dry screw vacuum pump is recommended as the backing pump.
Product Parameters
| Model | Pumping speed (L/S) | Ultimate pressure (Pa) | Max. pressure difference (Pa) | Motor speed (rpm) | Motor Power (kw) | Size(mm) | Weight (kg) | |
| Inlet | Outlet | |||||||
| ZJ-30 | 30 | 6xl0-2 | 8000 | 2770 | 0.75 | 50 | 40 | 66 |
| ZJP-30 | 5xl0-2 | 75 | ||||||
| ZJ-70 | 70 | 6xl0-2 | 6000 | 2780 | 1.5 | 80 | 50 | 87 |
| ZJP-70 | 5xl0-2 | 100 | ||||||
| ZJ-150 | 150 | 6xl0-2 | 6000 | 2900 | 3 | 100 | 100 | 198 |
| ZJP-150 | 5xl0-2 | 215 | ||||||
| ZJ-300 | 300 | 6xl0-2 | 5000 | 1450 | 4 | 150 | 150 | 490 |
| ZJP-300 | 5xl0-2 | 480 | ||||||
| ZJ-600 | 600 | 6xl0-2 | 4000 | 2900 | 5.5 | 150 | 150 | 490 |
| ZJP-600 | 5xl0-2 | 503 | ||||||
| ZJ-1200 | 1200 | 6xl0-2 | 3000 | 1450 | 11 | 300 | 300 | 1550 |
| ZJP-1200 | 5xl0-2 | 1580 | ||||||
| ZJ-2500 | 2500 | 5xl0-2 | 3000 | 2900 | 18.5 | 300 | 300 | 1620 |
Remark:
1. The pumping speed refers to the maximum pumping speed measured when the inlet pressure of the Roots vacuum pump is in the range of 67 Pa ~ 2.67 Pa under the condition that the recommended backing pump is used.
2. The ultimate pressure refers to the stable minimum air pressure measured at the inlet of the pump with a vacuum gauge after fully operation without any additional container, the pump port is closed and no intake air is provided under the condition that the recommended backing pump is used.
3. The performances in the above table are obtained under the condition that the recommended backing pump is used. Users can choose different backing vacuum pumps according to different situations, but their main performance data will vary.
Pressure diagram
Dimension
FAQ
Q: What information should I offer for an inquiry?
A: You can inquire based on the model directly, but it is always recommended that you contact us so that we can help you to check if the pump is the most appropriate for your application.
Q: Can you make a customized vacuum pump?
A: Yes, we can do some special designs to meet customer applications. Such as customized sealing systems, speical surface treatment can be applied for roots vacuum pump and screw vacuum pump. Please contact us if you have special requirements.
Q: I have problems with our vacuum pumps or vacuum systems, can you offer some help?
A: We have application and design engineers with more than 30 years of experience in vacuum applications in different industries and help a lot of customers resolve their problems, such as leakage issues, energy-saving solutions, more environment-friendly vacuum systems, etc. Please contact us and we’ll be very happy if we can offer any help to your vacuum system.
Q: Can you design and make customized vacuum systems?
A: Yes, we are good for this.
Q: What is your MOQ?
A: 1 piece or 1 set.
Q: How about your delivery time?
A: 5-10 working days for the standard vacuum pump if the quantity is below 20 pieces, 20-30 working days for the conventional vacuum system with less than 5 sets. For more quantity or special requirements, please contact us to check the lead time.
Q: What are your payment terms?
A: By T/T, 50% advance payment/deposit and 50% paid before shipment.
Q: How about the warranty?
A: We offer 1-year warranty (except for the wearing parts).
Q: How about the service?
A: We offer remote video technical support. We can send the service engineer to the site for some special requirements.
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| After-sales Service: | Online Video Instruction |
|---|---|
| Warranty: | 1 Year |
| Oil or Not: | Oil Free |
| Structure: | Rotary Vacuum Pump |
| Nominal Pumping Speed(50Hz): | 2500 L/S |
| Ultimate Pressure: | 0.05 PA |
What Is the Role of Vacuum Pumps in Semiconductor Manufacturing?
Vacuum pumps play a critical role in semiconductor manufacturing processes. Here’s a detailed explanation:
Semiconductor manufacturing involves the production of integrated circuits (ICs) and other semiconductor devices used in various electronic applications. Vacuum pumps are used extensively throughout the semiconductor manufacturing process to create and maintain the required vacuum conditions for specific manufacturing steps.
Here are some key roles of vacuum pumps in semiconductor manufacturing:
1. Deposition Processes: Vacuum pumps are used in deposition processes such as physical vapor deposition (PVD) and chemical vapor deposition (CVD). These processes involve depositing thin films of materials onto semiconductor wafers to create various layers and patterns. Vacuum pumps help create a low-pressure environment necessary for precise control of the deposition process, ensuring uniform and high-quality film formation.
2. Etching and Cleaning: Vacuum pumps are utilized in etching and cleaning processes, which involve the removal of specific layers or contaminants from semiconductor wafers. Dry etching techniques, such as plasma etching and reactive ion etching, require a vacuum environment to facilitate the ionization and removal of material. Vacuum pumps aid in creating the necessary low-pressure conditions for efficient etching and cleaning processes.
3. Ion Implantation: Ion implantation is a process used to introduce impurities into specific regions of a semiconductor wafer to modify its electrical properties. Vacuum pumps are used to evacuate the ion implantation chamber, creating the required vacuum environment for accurate and controlled ion beam acceleration and implantation.
4. Wafer Handling and Transfer: Vacuum pumps are employed in wafer handling and transfer systems. These systems utilize vacuum suction to securely hold and manipulate semiconductor wafers during various manufacturing steps, such as loading and unloading from process chambers, robotic transfer between tools, and wafer alignment.
5. Load Lock Systems: Load lock systems are used to transfer semiconductor wafers between atmospheric conditions and the vacuum environment of process chambers. Vacuum pumps are integral components of load lock systems, creating and maintaining the vacuum conditions necessary for wafer transfer while minimizing contamination risks.
6. Metrology and Inspection: Vacuum pumps are utilized in metrology and inspection tools used for characterizing semiconductor devices. These tools, such as scanning electron microscopes (SEMs) and focused ion beam (FIB) systems, often operate in a vacuum environment to enable high-resolution imaging and accurate analysis of semiconductor structures and defects.
7. Leak Detection: Vacuum pumps are employed in leak detection systems to identify and locate leaks in vacuum chambers, process lines, and other components. These systems rely on vacuum pumps to evacuate the system and then monitor for any pressure rise, indicating the presence of leaks.
8. Cleanroom Environment Control: Semiconductor manufacturing facilities maintain cleanroom environments to prevent contamination during the fabrication process. Vacuum pumps are used in the design and operation of the cleanroom ventilation and filtration systems, helping to maintain the required air cleanliness levels by removing particulates and maintaining controlled air pressure differentials.
Vacuum pumps used in semiconductor manufacturing processes are often specialized to meet the stringent requirements of the industry. They need to provide high vacuum levels, precise control, low contamination levels, and reliability for continuous operation.
Overall, vacuum pumps are indispensable in semiconductor manufacturing, enabling the creation of the necessary vacuum conditions for various processes, ensuring the production of high-quality semiconductor devices.
What Is the Difference Between Dry and Wet Vacuum Pumps?
Dry and wet vacuum pumps are two distinct types of pumps that differ in their operating principles and applications. Here’s a detailed explanation of the differences between them:
Dry Vacuum Pumps:
Dry vacuum pumps operate without the use of any lubricating fluid or sealing water in the pumping chamber. They rely on non-contact mechanisms to create a vacuum. Some common types of dry vacuum pumps include:
1. Rotary Vane Pumps: Rotary vane pumps consist of a rotor with vanes that slide in and out of slots in the rotor. The rotation of the rotor creates chambers that expand and contract, allowing the gas to be pumped. The vanes and the housing are designed to create a seal, preventing gas from flowing back into the pump. Rotary vane pumps are commonly used in laboratories, medical applications, and industrial processes where a medium vacuum level is required.
2. Dry Screw Pumps: Dry screw pumps use two or more intermeshing screws to compress and transport gas. As the screws rotate, the gas is trapped between the threads and transported from the suction side to the discharge side. Dry screw pumps are known for their high pumping speeds, low noise levels, and ability to handle various gases. They are used in applications such as semiconductor manufacturing, chemical processing, and vacuum distillation.
3. Claw Pumps: Claw pumps use two rotors with claw-shaped lobes that rotate in opposite directions. The rotation creates a series of expanding and contracting chambers, enabling gas capture and pumping. Claw pumps are known for their oil-free operation, high pumping speeds, and suitability for handling dry and clean gases. They are commonly used in applications such as automotive manufacturing, food packaging, and environmental technology.
Wet Vacuum Pumps:
Wet vacuum pumps, also known as liquid ring pumps, operate by using a liquid, typically water, to create a seal and generate a vacuum. The liquid ring serves as both the sealing medium and the working fluid. Wet vacuum pumps are commonly used in applications where a higher level of vacuum is required or when handling corrosive gases. Some key features of wet vacuum pumps include:
1. Liquid Ring Pumps: Liquid ring pumps feature an impeller with blades that rotate eccentrically within a cylindrical casing. As the impeller rotates, the liquid forms a ring against the casing due to centrifugal force. The liquid ring creates a seal, and as the impeller spins, the volume of the gas chamber decreases, leading to the compression and discharge of gas. Liquid ring pumps are known for their ability to handle wet and corrosive gases, making them suitable for applications such as chemical processing, oil refining, and wastewater treatment.
2. Water Jet Pumps: Water jet pumps utilize a jet of high-velocity water to create a vacuum. The water jet entrains gases, and the mixture is then separated in a venturi section, where the water is recirculated, and the gases are discharged. Water jet pumps are commonly used in laboratories and applications where a moderate vacuum level is required.
The main differences between dry and wet vacuum pumps can be summarized as follows:
1. Operating Principle: Dry vacuum pumps operate without the need for any sealing fluid, while wet vacuum pumps utilize a liquid ring or water as a sealing and working medium.
2. Lubrication: Dry vacuum pumps do not require lubrication since there is no contact between moving parts, whereas wet vacuum pumps require the presence of a liquid for sealing and lubrication.
3. Applications: Dry vacuum pumps are suitable for applications where a medium vacuum level is required, and oil-free operation is desired. They are commonly used in laboratories, medical settings, and various industrial processes. Wet vacuum pumps, on the other hand, are used when a higher vacuum level is needed or when handling corrosive gases. They find applications in chemical processing, oil refining, and wastewater treatment, among others.
It’s important to note that the selection of a vacuum pump depends on specific requirements such as desired vacuum level, gas compatibility, operating conditions, and the nature of the application.
In summary, the primary distinction between dry and wet vacuum pumps lies in their operating principles, lubrication requirements, and applications. Dry vacuum pumps operate without any lubricating fluid, while wet vacuum pumps rely on a liquid ring or water for sealing and lubrication. The choice between dry and wet vacuum pumps depends on the specific needs of the application and the desired vacuum level.
How Do You Choose the Right Size Vacuum Pump for a Specific Application?
Choosing the right size vacuum pump for a specific application involves considering several factors to ensure optimal performance and efficiency. Here’s a detailed explanation:
1. Required Vacuum Level: The first consideration is the desired vacuum level for your application. Different applications have varying vacuum level requirements, ranging from low vacuum to high vacuum or even ultra-high vacuum. Determine the specific vacuum level needed, such as microns of mercury (mmHg) or pascals (Pa), and choose a vacuum pump capable of achieving and maintaining that level.
2. Pumping Speed: The pumping speed, also known as the displacement or flow rate, is the volume of gas a vacuum pump can remove from a system per unit of time. It is typically expressed in liters per second (L/s) or cubic feet per minute (CFM). Consider the required pumping speed for your application, which depends on factors such as the volume of the system, the gas load, and the desired evacuation time.
3. Gas Load and Composition: The type and composition of the gas or vapor being pumped play a significant role in selecting the right vacuum pump. Different pumps have varying capabilities and compatibilities with specific gases. Some pumps may be suitable for pumping only non-reactive gases, while others can handle corrosive gases or vapors. Consider the gas load and its potential impact on the pump’s performance and materials of construction.
4. Backing Pump Requirements: In some applications, a vacuum pump may require a backing pump to reach and maintain the desired vacuum level. A backing pump provides a rough vacuum, which is then further processed by the primary vacuum pump. Consider whether your application requires a backing pump and ensure compatibility and proper sizing between the primary pump and the backing pump.
5. System Leakage: Evaluate the potential leakage in your system. If your system has significant leakage, you may need a vacuum pump with a higher pumping speed to compensate for the continuous influx of gas. Additionally, consider the impact of leakage on the required vacuum level and the pump’s ability to maintain it.
6. Power Requirements and Operating Cost: Consider the power requirements of the vacuum pump and ensure that your facility can provide the necessary electrical supply. Additionally, assess the operating cost, including energy consumption and maintenance requirements, to choose a pump that aligns with your budget and operational considerations.
7. Size and Space Constraints: Take into account the physical size of the vacuum pump and whether it can fit within the available space in your facility. Consider factors such as pump dimensions, weight, and the need for any additional accessories or support equipment.
8. Manufacturer’s Recommendations and Expert Advice: Consult the manufacturer’s specifications, guidelines, and recommendations for selecting the right pump for your specific application. Additionally, seek expert advice from vacuum pump specialists or engineers who can provide insights based on their experience and knowledge.
By considering these factors and evaluating the specific requirements of your application, you can select the right size vacuum pump that meets the desired vacuum level, pumping speed, gas compatibility, and other essential criteria. Choosing the appropriate vacuum pump ensures efficient operation, optimal performance, and longevity for your application.
editor by Dream 2024-05-10