China Standard 4 Kw Zj-300 Roots Vacuum Dry Pump for Chemical Industry vacuum pump belt

Product Description

 

Working principle

Roots vacuum pump, also known as mechanical booster pump, is a rotary positive displacement vacuum pump. The schematic structure of the Roots vacuum pump is shown in Figure on the left. There are 2 figure-8 rotors in the pump chamber, which are installed on a pair of shafts in parallel, and are driven by a pair of synchronous gear. The rotor and the rotor, the rotors and the pump chamber maintain a certain gap and do not contact each other, so the friction loss during operation is very small, the friction power consumption is extremely small, and high-speed operation can be achieved.

Figure below shows the internal structure of the Roots vacuum pump. The 2 rotors of the pump are supported in the rolling bearings on the end covers on both sides of the pump chamber, and rely on a pair of adjustable synchronous gears to keep the 2 rotors rotating at high speed. A certain mutual position, and the end face gap between the rotor and the end cover is guaranteed by the special structure of the fixed end (closer to the motor side), so that the pump can only expand to 1 end of the gearbox due to heat during operation.
 

The 4 sets of PTFE piston ring seals in the end caps on both sides can prevent the lubricating oil in the oil tanks on both sides from entering the pump chamber, and the balanced mechanical seal at the outlet shaft can prevent the atmosphere from leaking into the pump chamber.
The cooling method of the pump is usually air cooling. If the pump is used for working in the high pressure range, it is recommended to select a pump with a water cooling structure. The power of the motor is transmitted to the driving shaft through the coupling, and then the driven shaft is driven to rotate by the driving shaft through the synchronous gear. ZJ series Roots vacuum pumps are of horizontal structure, and the pump is directly connected with the motor by means of a coupling. But the pump with special requirements can adopt the V-belt drive structure.
 

ZJP type Roots vacuum pump with bypass valve is a derivative product of ZJ type Roots vacuum pump. The pumping principle is the same as that of ZJ type pump. It also uses a pair of 8-shaped rotors to maintain a certain gap in the pump casing. It rotates to generate suction and exhaust. The difference is that the inlet and exhaust ports of the ZJP type Roots vacuum pump with bypass valve are connected, and a gravity valve is installed vertically on the channel of the 2 (see Figure on the left). When the force on the valve caused by the pressure difference between the intake port and the exhaust port exceeds the weight of the valve itself, it will automatically open. This value of pressure difference which cause the valve to open is the highest differential pressure at which the pump can operate reliably. Therefore, this valve is actually an overload automatic protection valve, and it is also the biggest advantage of ZJP type Roots vacuum pump. Theoretically, the ZJP Roots pump can be started synchronously with the backing pump under atmospheric pressure to pump the system. If the system volume is large, the bypass valve of the ZJP Roots pump is open for a long time, and the pump’s effective pumping speed is small, so it is not economical to start the ZJP type Roots pump at atmospheric pressure for large systems. It is recommended to start the ZJP Roots vacuum pump when the backing pump reaches a certain pressure.

The advantage of the Roots vacuum pump is that it has a higher pumping speed at a lower inlet pressure, but it cannot be used alone. There must be a backing vacuum pump in series, and the pressure in the system is pumped by the backing vacuum pump to an allowable starting pressure of the Roots vacuum pump before it is started(See figure on the left). In general, the Roots vacuum pump is not allowed to work under high pressure difference, otherwise it will be overloaded, overheated and damaged, so the backing vacuum pump must be selected reasonably, and the necessary protective equipment must be installed.
The backing vacuum pump is generally an oil-sealed mechanical pump, but if the ultimate pressure requirement is not high, other forms of rough vacuum pump can be used as the backing pump, especially when the gas containing a large amount of water vapor is extracted, the dry screw vacuum pump is recommended as the backing pump.
 

 

Product Parameters

Model Pumping speed (L/S) Ultimate pressure (Pa) Max. pressure difference (Pa) Motor speed (rpm) Motor Power (kw) Size(mm) Weight (kg)
Inlet Outlet
ZJ-30 30 6xl0-2 8000 2770 0.75 50 40 66
ZJP-30 5xl0-2 75
ZJ-70 70 6xl0-2 6000 2780 1.5 80 50 87
ZJP-70 5xl0-2 100
ZJ-150 150 6xl0-2 6000 2900 3 100 100 198
ZJP-150 5xl0-2 215
ZJ-300 300 6xl0-2 5000 1450 4 150 150 490
ZJP-300 5xl0-2 480
ZJ-600 600 6xl0-2 4000 2900 5.5 150 150 490
ZJP-600 5xl0-2 503
ZJ-1200 1200 6xl0-2 3000 1450 11 300 300 1550
ZJP-1200 5xl0-2 1580
ZJ-2500 2500 5xl0-2 3000 2900 18.5 300 300 1620

 

Remark:
1. The pumping speed refers to the maximum pumping speed measured when the inlet pressure of the Roots vacuum pump is in the range of 67 Pa ~ 2.67 Pa under the condition that the recommended backing pump is used.
2. The ultimate pressure refers to the stable minimum air pressure measured at the inlet of the pump with a vacuum gauge after fully operation without any additional container, the pump port is closed and no intake air is provided under the condition that the recommended backing pump is used.
3. The performances in the above table are obtained under the condition that the recommended backing pump is used. Users can choose different backing vacuum pumps according to different situations, but their main performance data will vary.
 

Pressure diagram

 

 

Dimension

 

FAQ

Q: What information should I offer for an inquiry?
A: You can inquire based on the model directly, but it is always recommended that you contact us so that we can help you to check if the pump is the most appropriate for your application.

Q: Can you make a customized vacuum pump?
A: Yes, we can do some special designs to meet customer applications. Such as customized sealing systems, speical surface treatment can be applied for roots vacuum pump and screw vacuum pump. Please contact us if you have special requirements. 

Q: I have problems with our vacuum pumps or vacuum systems, can you offer some help?
A: We have application and design engineers with more than 30 years of experience in vacuum applications in different industries and help a lot of customers resolve their problems, such as leakage issues, energy-saving solutions, more environment-friendly vacuum systems, etc. Please contact us and we’ll be very happy if we can offer any help to your vacuum system.

Q: Can you design and make customized vacuum systems?
A: Yes, we are good for this.

Q: What is your MOQ?
A: 1 piece or 1 set.

Q: How about your delivery time?
A: 5-10 working days for the standard vacuum pump if the quantity is below 20 pieces, 20-30 working days for the conventional vacuum system with less than 5 sets. For more quantity or special requirements, please contact us to check the lead time.

Q: What are your payment terms?
A: By T/T, 50% advance payment/deposit and 50% paid before shipment.

Q: How about the warranty?
A: We offer 1-year warranty (except for the wearing parts).

Q: How about the service?
A: We offer remote video technical support. We can send the service engineer to the site for some special requirements.

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After-sales Service: Online Video Instruction
Warranty: 1 Year
Oil or Not: Oil Free
Structure: Rotary Vacuum Pump
Nominal Pumping Speed(50Hz): 300 L/S
Ultimate Pressure: 0.06 PA

vacuum pump

What Is the Role of Vacuum Pumps in Semiconductor Manufacturing?

Vacuum pumps play a critical role in semiconductor manufacturing processes. Here’s a detailed explanation:

Semiconductor manufacturing involves the production of integrated circuits (ICs) and other semiconductor devices used in various electronic applications. Vacuum pumps are used extensively throughout the semiconductor manufacturing process to create and maintain the required vacuum conditions for specific manufacturing steps.

Here are some key roles of vacuum pumps in semiconductor manufacturing:

1. Deposition Processes: Vacuum pumps are used in deposition processes such as physical vapor deposition (PVD) and chemical vapor deposition (CVD). These processes involve depositing thin films of materials onto semiconductor wafers to create various layers and patterns. Vacuum pumps help create a low-pressure environment necessary for precise control of the deposition process, ensuring uniform and high-quality film formation.

2. Etching and Cleaning: Vacuum pumps are utilized in etching and cleaning processes, which involve the removal of specific layers or contaminants from semiconductor wafers. Dry etching techniques, such as plasma etching and reactive ion etching, require a vacuum environment to facilitate the ionization and removal of material. Vacuum pumps aid in creating the necessary low-pressure conditions for efficient etching and cleaning processes.

3. Ion Implantation: Ion implantation is a process used to introduce impurities into specific regions of a semiconductor wafer to modify its electrical properties. Vacuum pumps are used to evacuate the ion implantation chamber, creating the required vacuum environment for accurate and controlled ion beam acceleration and implantation.

4. Wafer Handling and Transfer: Vacuum pumps are employed in wafer handling and transfer systems. These systems utilize vacuum suction to securely hold and manipulate semiconductor wafers during various manufacturing steps, such as loading and unloading from process chambers, robotic transfer between tools, and wafer alignment.

5. Load Lock Systems: Load lock systems are used to transfer semiconductor wafers between atmospheric conditions and the vacuum environment of process chambers. Vacuum pumps are integral components of load lock systems, creating and maintaining the vacuum conditions necessary for wafer transfer while minimizing contamination risks.

6. Metrology and Inspection: Vacuum pumps are utilized in metrology and inspection tools used for characterizing semiconductor devices. These tools, such as scanning electron microscopes (SEMs) and focused ion beam (FIB) systems, often operate in a vacuum environment to enable high-resolution imaging and accurate analysis of semiconductor structures and defects.

7. Leak Detection: Vacuum pumps are employed in leak detection systems to identify and locate leaks in vacuum chambers, process lines, and other components. These systems rely on vacuum pumps to evacuate the system and then monitor for any pressure rise, indicating the presence of leaks.

8. Cleanroom Environment Control: Semiconductor manufacturing facilities maintain cleanroom environments to prevent contamination during the fabrication process. Vacuum pumps are used in the design and operation of the cleanroom ventilation and filtration systems, helping to maintain the required air cleanliness levels by removing particulates and maintaining controlled air pressure differentials.

Vacuum pumps used in semiconductor manufacturing processes are often specialized to meet the stringent requirements of the industry. They need to provide high vacuum levels, precise control, low contamination levels, and reliability for continuous operation.

Overall, vacuum pumps are indispensable in semiconductor manufacturing, enabling the creation of the necessary vacuum conditions for various processes, ensuring the production of high-quality semiconductor devices.

vacuum pump

Can Vacuum Pumps Be Used in the Production of Solar Panels?

Yes, vacuum pumps are extensively used in the production of solar panels. Here’s a detailed explanation:

Solar panels, also known as photovoltaic (PV) panels, are devices that convert sunlight into electricity. The manufacturing process of solar panels involves several critical steps, many of which require the use of vacuum pumps. Vacuum technology plays a crucial role in ensuring the efficiency, reliability, and quality of solar panel production. Here are some key areas where vacuum pumps are utilized:

1. Silicon Ingot Production: The first step in solar panel manufacturing is the production of silicon ingots. These ingots are cylindrical blocks of pure crystalline silicon that serve as the raw material for solar cells. Vacuum pumps are used in the Czochralski process, which involves melting polycrystalline silicon in a quartz crucible and then slowly pulling a single crystal ingot from the molten silicon. Vacuum pumps create a controlled environment by removing impurities and preventing contamination during the crystal growth process.

2. Wafering: After the silicon ingots are produced, they undergo wafering, where the ingots are sliced into thin wafers. Vacuum pumps are used in wire saws to create a low-pressure environment that helps to cool and lubricate the cutting wire. The vacuum also assists in removing the silicon debris generated during the slicing process, ensuring clean and precise cuts.

3. Solar Cell Production: Vacuum pumps play a significant role in various stages of solar cell production. Solar cells are the individual units within a solar panel that convert sunlight into electricity. Vacuum pumps are used in the following processes:

– Diffusion: In the diffusion process, dopants such as phosphorus or boron are introduced into the silicon wafer to create the desired electrical properties. Vacuum pumps are utilized in the diffusion furnace to create a controlled atmosphere for the diffusion process and remove any impurities or gases that may affect the quality of the solar cell.

– Deposition: Thin films of materials such as anti-reflective coatings, passivation layers, and electrode materials are deposited onto the silicon wafer. Vacuum pumps are used in various deposition techniques like physical vapor deposition (PVD) or chemical vapor deposition (CVD) to create the necessary vacuum conditions for precise and uniform film deposition.

– Etching: Etching processes are employed to create the desired surface textures on the solar cell, which enhance light trapping and improve efficiency. Vacuum pumps are used in plasma etching or wet etching techniques to remove unwanted material or create specific surface structures on the solar cell.

4. Encapsulation: After the solar cells are produced, they are encapsulated to protect them from environmental factors such as moisture and mechanical stress. Vacuum pumps are used in the encapsulation process to create a vacuum environment, ensuring the removal of air and moisture from the encapsulation materials. This helps to achieve proper bonding and prevents the formation of bubbles or voids, which could degrade the performance and longevity of the solar panel.

5. Testing and Quality Control: Vacuum pumps are also utilized in testing and quality control processes during solar panel production. For example, vacuum systems can be used for leak testing to ensure the integrity of the encapsulation and to detect any potential defects or leaks in the panel assembly. Vacuum-based measurement techniques may also be employed for assessing the electrical characteristics and efficiency of the solar cells or panels.

In summary, vacuum pumps are integral to the production of solar panels. They are used in various stages of the manufacturing process, including silicon ingot production, wafering, solar cell production (diffusion, deposition, and etching), encapsulation, and testing. Vacuum technology enables precise control, contamination prevention, and efficient processing, contributing to the production of high-quality and reliable solar panels.vacuum pump

Can Vacuum Pumps Be Used in Laboratories?

Yes, vacuum pumps are extensively used in laboratories for a wide range of applications. Here’s a detailed explanation:

Vacuum pumps are essential tools in laboratory settings as they enable scientists and researchers to create and control vacuum or low-pressure environments. These controlled conditions are crucial for various scientific processes and experiments. Here are some key reasons why vacuum pumps are used in laboratories:

1. Evaporation and Distillation: Vacuum pumps are frequently used in laboratory evaporation and distillation processes. By creating a vacuum, they lower the boiling point of liquids, allowing for gentler and more controlled evaporation. This is particularly useful for heat-sensitive substances or when precise control over the evaporation process is required.

2. Filtration: Vacuum filtration is a common technique in laboratories for separating solids from liquids or gases. Vacuum pumps create suction, which helps draw the liquid or gas through the filter, leaving the solid particles behind. This method is widely used in processes such as sample preparation, microbiology, and analytical chemistry.

3. Freeze Drying: Vacuum pumps play a crucial role in freeze drying or lyophilization processes. Freeze drying involves removing moisture from a substance while it is in a frozen state, preserving its structure and properties. Vacuum pumps facilitate the sublimation of frozen water directly into vapor, resulting in the removal of moisture under low-pressure conditions.

4. Vacuum Ovens and Chambers: Vacuum pumps are used in conjunction with vacuum ovens and chambers to create controlled low-pressure environments for various applications. Vacuum ovens are used for drying heat-sensitive materials, removing solvents, or conducting reactions under reduced pressure. Vacuum chambers are utilized for testing components under simulated space or high-altitude conditions, degassing materials, or studying vacuum-related phenomena.

5. Analytical Instruments: Many laboratory analytical instruments rely on vacuum pumps to function properly. For example, mass spectrometers, electron microscopes, surface analysis equipment, and other analytical instruments often require vacuum conditions to maintain sample integrity and achieve accurate results.

6. Chemistry and Material Science: Vacuum pumps are employed in numerous chemical and material science experiments. They are used for degassing samples, creating controlled atmospheres, conducting reactions under reduced pressure, or studying gas-phase reactions. Vacuum pumps are also used in thin film deposition techniques like physical vapor deposition (PVD) and chemical vapor deposition (CVD).

7. Vacuum Systems for Experiments: In scientific research, vacuum systems are often designed and constructed for specific experiments or applications. These systems can include multiple vacuum pumps, valves, and chambers to create specialized vacuum environments tailored to the requirements of the experiment.

Overall, vacuum pumps are versatile tools that find extensive use in laboratories across various scientific disciplines. They enable researchers to control and manipulate vacuum or low-pressure conditions, facilitating a wide range of processes, experiments, and analyses. The choice of vacuum pump depends on factors such as required vacuum level, flow rate, chemical compatibility, and specific application needs.

China Standard 4 Kw Zj-300 Roots Vacuum Dry Pump for Chemical Industry   vacuum pump belt	China Standard 4 Kw Zj-300 Roots Vacuum Dry Pump for Chemical Industry   vacuum pump belt
editor by Dream 2024-05-14

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