chemical vapor deposition CVD film equipment for semiconductor skinny movie
Item description of CVD movie machine
1500ºC single heating zone lower vacuum CVD film machine(CY-O1500-60IT-3F-LV) is made up of a 1500ºC single temperature zone tube furnace, a 3-channel float flowmeter and a double phase rotary vane vacuum pump. The gaseous reactant is shaped by a lawful response beneath certain situations to sort a solid period solution deposited on the area of the substrate to type a strong movie.
CVD film equipment is managed by the precision temperature management instrument for PID temperature manage. It can edit the 30-segment lifting temperature system and has the perform of overheating and brief circuit protection. The flanges on both sides of the furnace tube are outfitted with a electronic vacuum gauge and a mechanical strain gauge, which can be utilized to management the atmosphere in the furnace tube. At the exact same time, the tube furnace is operated by large-definition accurate colour touch display screen, which is effortless to use. Even non-professionals can grasp the use of the instrument following easy coaching, which can significantly increase your experiment efficiency.
The furnace tube of CVD film equipment is created of higher-purity alumina, and the furnace physique adopts built-in layout. The special design and style can make sure the method is secure and risk-free at 1500ºC. The heating element is produced of large-good quality silicon carbon rod, which can attain 1500ºC high temperature. If the buyer has the need, the silicon molybdenum rod heating aspect CZPT to obtain a higher temperature of 1700ºC.
The method is equipped with a three-channel float flowmeter, which can mix 1~three channels of fuel to correctly put together the blended fuel needed for the experiment. Yet another force gauge is installed on the front of the float flowmeter to check the gasoline strain and the mixing tank pressure.
It is ideal for high-temperature sintering, steel annealing, top quality inspection, etc. in universities, analysis institutes, industrial and mining enterprises, specially for CVD experiments that demand a range of fuel mixing atmospheres. CZPT preparation from chemical response by chemical reaction deposition
CZPT parameters of CVD movie equipment
|Vacuum tube furnace||Model||CY-O1500-60IT|
|Tube content||Higher purity alumina|
|CZPT chamber duration||400mm|
|Heating zone duration||300mm|
|Consistent temperature zone||150mm|
|Temperature manage precision||±1ºC|
|Temperature manage mode||thirty or fifty phase software temperature handle|
|CZPT technique||304 stainless metal vacuum flange|
|Flange interface||1/4″ ferrule connector, KF16/25/40 joint|
|Electrical power supply||AC:220V fifty/60Hz|
|Gasoline provide method||Product||CY-3F|
|Measuring unit||Gas float flowmeter|
|Measuring range||A channel: ~100ml H2 gas||Remarks: If you need other ranges or gas kinds, you want to specify when purchasing. According to the customer’s specific specifications, the flow meter of the corresponding gas type and selection can be selected.|
|B channel: 16~160ml N2 gasoline|
|C channel: 25~250ml Ar fuel|
|Pipe stress resistance||3MPa|
|Doing work stress variation||50~300KPa|
|Connecting pipe||304 stainless metal|
|Gasoline channel||304 stainless metal needle valve|
|Interface specification||1/4″ ferrule connector for gas inlet and outlet|
|Exhaust system||CZPT pump||Rotary vane pump|
|Vacuum measurement||Resistance gauge|
|Electrical power supply||AC:220V 50/60Hz|
Be aware: According to the requirements of the experiment, you can select the temperature, temperature zone, furnace measurement, vacuum method, flowmeter
Connected photographs of CVD movie machine
Launched in 2005, HangZhou CY CZPT CZPT Co., Ltd. is a organization specializing in the advancement and production of laboratory technology analysis equipment. The merchandise are combined, pressed, burned, reduce, ground, polished, coated, analytical tools and relevant consumables. CZPT consist of laboratory sintering gear, coating products and so on. At present, it has been exported to twenty five nations around the world and areas this kind of as the CZPT States, CZPTe, and CZPT Asia, and has been well acquired by different scientific research models.
We have a experienced technological innovation analysis and development staff, the variety of experts is 33, the organization has one hundred fifty folks, much more than five hundred sq. meters of business office place, the manufacturing unit handles an spot of about 1,500 sq. meters situated in HangZhou Substantial-tech Zone CZPTtronic CZPT Park. The items are mostly positioned in the research marketplace, serving scientific research in the labs of universities and faculties, and can also customise products in accordance to your requirements.
Q. Are you a producer or a buying and selling business?
A. We are skilled laboratory instrument makers, have their very own design and style crew and manufacturing unit, have experienced technical encounter, and can guarantee the high quality of goods and the optimal cost.
Q. How is your company’s product soon after-product sales service program?
A. The solution warranty period is twelve months, we can provide life time upkeep. We have skilled pre-product sales and following-revenue departments that can answer to you in 24 hours to resolve any complex concerns.
Q. How long is your supply time? If I want to customise the instrument, how prolonged does it get?
A.1. If the merchandise are in inventory, it is five-ten days. 2. We can supply CZPT providers for our consumers. It generally normally takes thirty-sixty times based on the requirements of the personalized instrument.
Q. Our country’s power offer and plug are distinct. How do you remedy it?
A. We can offer a transformer and plug according to your neighborhood specifications in accordance to the electrical power plug of various international locations.
Q. How to shell out?
A.T / T, L / C, D / P, etc., it is advisable to use Alibaba CZPT Ensure.
Q. How is the package deal of products? Delivery methods?
A.one. Normal export fumigation indication wooden box packaging two. Specific, air, sea shipping and delivery in accordance to client requirements, uncover the most ideal way.
More queries, you should get in touch with buyer services