Chemical Vapor Deposition Film Machine for Semiconductor Thin Film

Chemical Vapor Deposition  Film Machine for Semiconductor Thin Film

chemical vapor deposition CVD film equipment for semiconductor skinny movie

Item description of CVD movie machine

1500ºC single heating zone lower vacuum CVD film machine(CY-O1500-60IT-3F-LV) is made up of a 1500ºC single temperature zone tube furnace, a 3-channel float flowmeter and a double phase rotary vane vacuum pump. The gaseous reactant is shaped by a lawful response beneath certain situations to sort a solid period solution deposited on the area of the substrate to type a strong movie.

CVD film equipment is managed by the precision temperature management instrument for PID temperature manage. It can edit the 30-segment lifting temperature system and has the perform of overheating and brief circuit protection. The flanges on both sides of the furnace tube are outfitted with a electronic vacuum gauge and a mechanical strain gauge, which can be utilized to management the atmosphere in the furnace tube. At the exact same time, the tube furnace is operated by large-definition accurate colour touch display screen, which is effortless to use. Even non-professionals can grasp the use of the instrument following easy coaching, which can significantly increase your experiment efficiency.

The furnace tube of  CVD film equipment is created of higher-purity alumina, and the furnace physique adopts built-in layout. The special design and style can make sure the method is secure and risk-free at 1500ºC. The heating element is produced of large-good quality silicon carbon rod, which can attain 1500ºC high temperature. If the buyer has the need, the silicon molybdenum rod heating aspect CZPT to obtain a higher temperature of 1700ºC.

The method is equipped with a three-channel float flowmeter, which can mix 1~three channels of fuel to correctly put together the blended fuel needed for the experiment. Yet another force gauge is installed on the front of the float flowmeter to check the gasoline strain and the mixing tank pressure.

applications:
It is ideal for high-temperature sintering, steel annealing, top quality inspection, etc. in universities, analysis institutes, industrial and mining enterprises, specially for CVD experiments that demand a range of fuel mixing atmospheres. CZPT preparation from chemical response by chemical reaction deposition

CZPT parameters of CVD movie equipment

Vacuum tube   furnace Model CY-O1500-60IT
Tube content Higher purity alumina
Tube diameter 60mm
Tube size 1000mm
CZPT chamber   duration 400mm
Heating zone   duration 300mm
Consistent   temperature zone 150mm
Running   temperature ≤1450ºC
Temperature  manage precision ±1ºC
Temperature   manage mode thirty or fifty phase software temperature handle
Show mode Lcd
CZPT   technique 304 stainless metal vacuum flange
Flange interface 1/4″ ferrule connector, KF16/25/40 joint
Vacuum 4.4×10E-3Pa
Electrical power supply AC:220V   fifty/60Hz
Gasoline provide   method Product CY-3F
Fuel channel 3-channel
Measuring   unit Gas float   flowmeter
Measuring range A channel: ~100ml H2 gas Remarks: If you need other ranges or gas kinds, you want to specify when purchasing. According to the customer’s specific specifications, the flow meter of the   corresponding gas type and selection can be selected.
B channel: 16~160ml  N2 gasoline
C channel: 25~250ml  Ar fuel
measurement   accuracy ±2.%
Pipe   stress resistance 3MPa
Doing work   stress variation 50~300KPa
Connecting   pipe 304 stainless metal
Gasoline channel 304 stainless metal needle valve
Interface   specification 1/4″ ferrule connector for gas inlet and outlet
Exhaust   system CZPT   pump Rotary vane pump
Pumping rate one.1L/S 
Exhaust   interface KF16
Vacuum   measurement Resistance gauge
Ultimate   vacuum one.0E-1Pa
Electrical power supply AC:220V   50/60Hz
Pumping   interface KF16

Be aware: According to the requirements of the experiment, you can select the temperature, temperature zone, furnace measurement, vacuum method, flowmeter

Connected photographs of CVD movie machine

Launched in 2005, HangZhou CY CZPT CZPT Co., Ltd. is a organization specializing in the advancement and production of laboratory technology analysis equipment. The merchandise are combined, pressed, burned, reduce, ground, polished, coated, analytical tools and relevant consumables. CZPT consist of laboratory sintering gear, coating products and so on. At present, it has been exported to twenty five nations around the world and areas this kind of as the CZPT States, CZPTe, and CZPT Asia, and has been well acquired by different scientific research models.

We have a experienced technological innovation analysis and development staff, the variety of experts is 33, the organization has one hundred fifty folks, much more than five hundred sq. meters of business office place, the manufacturing unit handles an spot of about 1,500 sq. meters situated in HangZhou Substantial-tech Zone CZPTtronic CZPT Park. The items are mostly positioned in the research marketplace, serving scientific research in the labs of universities and faculties, and can also customise products in accordance to your requirements.

Q. Are you a producer or a buying and selling business?
A. We are skilled laboratory instrument makers, have their very own design and style crew and manufacturing unit, have experienced technical encounter, and can guarantee the high quality of goods and the optimal cost.

Q. How is your company’s product soon after-product sales service program?
A. The solution warranty period is twelve months, we can provide life time upkeep. We have skilled pre-product sales and following-revenue departments that can answer to you in 24 hours to resolve any complex concerns.

Q. How long is your supply time? If I want to customise the instrument, how prolonged does it get?
A.1. If the merchandise are in inventory, it is five-ten days. 2. We can supply CZPT providers for our consumers. It generally normally takes thirty-sixty times based on the requirements of the personalized instrument.

Q. Our country’s power offer and plug are distinct. How do you remedy it?
A. We can offer a transformer and plug according to your neighborhood specifications in accordance to the electrical power plug of various international locations.

Q. How to shell out?
A.T / T, L / C, D / P, etc., it is advisable to use Alibaba CZPT Ensure.

Q. How is the package deal of products? Delivery methods?
A.one. Normal export fumigation indication wooden box packaging two. Specific, air, sea shipping and delivery in accordance to client requirements, uncover the most ideal way.

More queries, you should get in touch with buyer services

 

Chemical Vapor Deposition  Film Machine for Semiconductor Thin Film